Kawasaki Cleanroom NT420

NT series robots designed for the cleanroom application can reach up to four FOUP, the NT420 double arm robot provides standard performance of 280 wafers per hour (WPH) with aligner and 400 WPH without aligner. The software and hardware are equipped with collision detection functions and comply with the SEMI F47 voltage exoneration standards and SEMI S2 environmental, health and safety standards.

• Servo complete digital system
• Controlled Axes: Maximum 7 axes
• Manual, semi-automatic, fully automatic teaching.
• External emergency stop, near security, external stop.
• Hardware: RS232C x 1 Ethernet.
• Software: K-Utility (original Kawasaki communication command for clean robots).
• Energy: Voltage: Single-phase, AC208 V ± 10%, 50/60 Hz. Standard: SEMI F47.
• Input signal: Maximum 16 channels.
• Output signal: Maximum of 8 channels
• Compatible robots series: NS, NT, NX, TT, TX and NV

• Servo complete digital system
• Controlled Axes: Maximum 12 axes
• Manual, semi-automatic, fully automatic teaching.
• External emergency stop, near security, external stop.
• Hardware: RS232C x 2 Ethernet.
• Software: K-Utility (original Kawasaki communication command for clean robots).
• Energy: Voltage: Single-phase, AC208 V ± 10%, 50/60 Hz. Standard: SEMI F47.
• Input signal: Maximum 96 channels
• Output signal: Maximum of 80 channels
• Compatible robots series: NS, NT, NX, TT, TX and NV