Kawasaki Cleanroom NT410

Awaiting more stock

Information
Specifications

NT series robots designed for the single arm NT410 cleanroom application can achieve up to four FOUPs, which provide standard performance of 280 wafers per hour (WPH) with aligner and 400 WPH without aligner. The software and hardware are equipped with collision detection functions and comply with SEMI F47 voltage sag immunity standards and SEMI S2 environmental, health and safety standards.

Controller D

D controllers are designed to develop cleanroom applications comprising a complete digital servo process, standard Ethernet communication port, compact footprint, flexible development of different software, independent operation of two arms and multi-axis controls, uniform servo amplifiers for all axes, standards environmental, health and safety SEMI S2, ISO 1 white room.

Specifications of the D60 controller

Servo complete digital system
Controlled Axes: Maximum 7 axes
Manual, semi-automatic, fully automatic teaching.
External emergency stop, near security, external stop.
Hardware: RS232C x 1 Ethernet.
Software: K-Utility (original Kawasaki communication command for clean robots).
Energy: Voltage: Single-phase, AC208 V ± 10%, 50/60 Hz. Standard: SEMI F47.
Input signal: Maximum 16 channels.
Output signal: Maximum of 8 channels
Compatible robots series: NS, NT, NX, TT, TX and NV

Specification of the D61 controller

Servo complete digital system
Controlled Axes: Maximum 12 axes
Manual, semi-automatic, fully automatic teaching.
External emergency stop, near security, external stop.
Hardware: RS232C x 2 Ethernet.
Software: K-Utility (original Kawasaki communication command for clean robots).
Energy: Voltage: Single-phase, AC208 V ± 10%, 50/60 Hz. Standard: SEMI F47.
Input signal: Maximum 96 channels
Output signal: Maximum of 80 channels
Compatible robots series: NS, NT, NX, TT, TX and NV

Main specifications

Number of axis: 4
Maximum l reach: 1,230 mm
Repeatability: ± 0.1 mm (wafer center)
Controller: D60/D61

Motion range (°)

θ1 axis (rotation JT2): 340°
Z axis (up-down JT3): 400 mm
θ2 axis (rotation JT4): 340°
H1 axis (rotation JT6): 340° (380°) como opción
H2 axis (rotation JT7): -

Robot applications

Cleanroom

Applications

Handling of parts , Assembly of parts

Pictures

Diagrams